45nm NOR Flash的生產(chǎn)驗證.pdf

1、摘要二。。..............…….............................……Abs七ract....................................................……引言……’.”.’.’.........................................……第一章NORFlash概述.......................................

2、.……第一節(jié)NFlash的基本結(jié)構(gòu)第二節(jié)NFlash的工作原理..............................……..............................……第二章45nmNFlash的介紹二...............................……第一節(jié)產(chǎn)品特點(diǎn)介紹……’.‘”””.””’..…’二”....……第二節(jié)失效分析中的難點(diǎn)……...……第三章45nmNFlash實現(xiàn)規(guī)模生產(chǎn)驗證過程和

3、失效分析的應(yīng)用...……第一節(jié)生產(chǎn)驗證目標(biāo)的介紹.……...……第二節(jié)驗證過程中的遇到的問題和解決方案……...……3.2.1篩選良率的提升……”’.”.……....……3.2.2質(zhì)量驗證DPM的降低…….....……3.2.3封裝的可靠性驗證中失效芯片的分類……......……第三節(jié)實現(xiàn)規(guī)模生產(chǎn)驗證前后數(shù)據(jù)的比較.目.................……第四章總結(jié)與展望二口...............................

4、.........……第一節(jié)研究結(jié)論.........................................……第二節(jié)展望….........................................……參考文獻(xiàn)…….........................................……致謝…….....................................……O…。1二2二4二6二6，915一1

5、5一172O.20一222332394648485O5153Ab5tractFlashmemory，astheehiP七0storedataandaPPlieations，15nowwidelyusedinmobilephones，storageeards，industrialequipments，digitalProduetsete.工n1984，F(xiàn)ujioMasuokafromToshiba，wasthefirstonetoerea

6、teanideaofFlashmemories.ThefeatureofFlashineludesnon一volatileandfastsPeed.Also，iteanendure1millionProgramanderaseeyelingswithadatastoragePeriodaslongas10years.FlasheanbedividedintoNORandNAND.NOR15usuallyusedtos七oreaPPlie

7、ationsandit15usefulinmobilePhone，automobileeleetroniesandnetworkingwhileNAND15targetedforstoragedevieesineludingSDeard，USBs七ieks，ete.WiththedeveloPmentofFABProeess，theNORFlashhasenteredaneweraof45nmfrom65nm.Asthefirs七45n

8、mNORFlashintheindustry，itwi11bringusgreatehallengesduringthequalifiea七ionProeess.Tobeginw1thaninunatureProeessandtoendwiththeeaPabilityofrunningmassproduetion，muehimProvementhas七0bemadeinbetween.Amongthemethodsofmakingif

9、nprovements，F(xiàn)ailureAnalysis(FA)15aneffectiveone.Andal50eveniftheProduethasbeenrunninginmassProduetionstage，failureanalysis15stillthemainmethodindealingwi七11eustomerreturns.Itprovidesteehniealsupporttotherequirementofeont

10、inuousimprovement.Thequalifiea七ionbeforemassproduetionusuallyfollowsbelowsteps:Firstofall15七。setthequalityandreliabilitygoal.Thentocollec七dataandanalyzethefailures，reporttouPstreamdePartmentssuehasFABabouttheanalysisresu

11、lt.LetthemmaketheeorresPondingactionstoimProve七h(yuǎn)equalityandreliabilityoftheproduets.Thus，finallyachievethegoalandmakeitPossiblefortheProduetion.The七h(yuǎn)esis15devidedinto4ehap七ers.Atfirst，itintrodueesthebasicofNORFlash，the45

12、nmnewted飛nol一ogyandthecorrespondil一堪changes.Theni七su朋arizesthefailureanalysisdonebeforeaehievingProduetionfor45nmNORFlashinordertodemonstratehowtoapp]ythebasicPrineiplesoffailureanalysistothenewteehnology.Failureanalysis