超大規(guī)模集成電路中變化互連線分析.pdf

1、分類號UDC洼!：學位論密級壘五文塑查塑模集成電路中變化互連線分析————————————————————=：：：：：：：———————————————————————一一(題名和副題名)指導教師姓名陸恒云(作者姓名)毫墊絲墼筮申請學位級別碩士論文提交E|期20056專業(yè)名稱壟劍堡迨生壟劍三堡論文答辯日期2005學位授予單位和日期——由立堡三盤堂答辯委員會主席評閱人2005年6月26日注1：注明《國際十進分類法UDC))的分類號。南京理

2、工大學碩士論文超大規(guī)模集成電路中變純互連線分析AbstractAstechnologyscalesunderstandingsemiconductormanufacturingvariationbecomesessentialtOeffectivelydesignIli曲performancecircuitsKnowledgeofprocessvariationisimportanttooptimizecriticalpathdelay

3、，minimizeclockskew，andreducecrosstalknoiseConventionalcircuittechniquestypicallyrepresenttheinterconnectanddeviceparametervailationsasrandomvariablesHoweverrecentstudieshaveshownthatstrongspatialpanemdependenciesexist，es

4、peciallywhenconsideringinterconnectvariationinchemicalmechan／caIpolis／dng(CMP)processesThereforethetotalvafia在oncanbesepamtedintosystematicandrandomcomponents，whereasignificantportionofthevariationcallbemodeledbasedonlay

5、outcharacteristicsModelingthesystematiccomponentsofdifferentvariationsourcesandimplementingtheseeffectsincircuitsimulationa∞keytoreducedesignuncertaintyandmaximizecircuitperformanceInthisthesisweattempttOstudythisproblem

6、withdistributedsystemtheoryAfterreadinglargenumbersofrelatedliterature，wefirstpresentedthreemethodsforinterconnectparametricuncertaintyinthiSthesisThefirstisnamedGETA，ThetechniquemodelsthestochasticresDonseinafinitedimen

7、sionalHilbertspaceintermsoforthogonalpolynomialexpansionsSecond，wepresentaLinearFractionalTransform(LFF)basedmodelforinterconnectParametricUncertainty，Thismodelformulatestheinterconnectparameteruncertaintyasarepeatedscal

8、arUllcertaintystructureThemostpnmaryachievementwegetisthatwepresentasimplebuteffectivemethodcalledstochasticfiniteelementmethodSupposedstochasticvariationsareperturbedinasmallrange，Wecailgetanonlinearequationofthesestoch

9、asticvariationsbyusingaTaylorseriesoraNeumannseriesexpansionofthesystemmatrixTheapplicationofperturbationtechniquestranslatesthisnonlinearequationintoapairofconstantlinearrecursiveeqaafions—Thenwehavewroteapaper‘Stochast