晶體硅微粉的氧化性質研究.pdf

1、分類號:UDC:密級:學號:405705306031南昌大學碩士研究生學位論文晶體硅微粉的氧化性質研究AStudyoftheOxidationBehaviorofCrystallineSiliconPowders鐘根香培養(yǎng)單位(院、系):指導教師姓名、職稱:中請學位的學科門類:學科專業(yè)名稱:論文答辯日期:材料科學與工程學院周浪教授工學材料學2008年12月20日答辯委員會主席:評閱人:翻缸2008年12月20日AbstractABSTR

2、ACTCrystallinesilieondustswidelyexistintheProeessofhighPuritysilieonProduetionandwaferProduetion，ineludingtheProcessofeuttingandgrinding.Also，themetallurgiealPurifieationteehnologiesforsolargradesilieonareoftenbasedonthe

3、silieonPowdersbygrindingfromthemetallurgiealgradesilieon.50it’5veryimPortanttosttldytheoxidationbehaviorofsilieonPowders.esPeeiallyfortheuseandstorageofthesilieonPowde稱thereeoveryofsawingandgrindingkerfsandthedeveloPment

4、ofmetallurgiealPurifieationteehnologies.InthePresentwork，theoxidationbehaviorsoferystallinesilieonPowdersinair，ultraPurewater，PEqadmixtureofwaterandPEqaeidiesolution，havebeenstudiedbymeansofTGA，XRDandEDX.Theresultsshowth

5、atnoobservableoxidationhaPPenedinthedryairat200oC，whileinwaterforsometimeabove80aCamorphous5102fmedonthesilieonPowderandtheoxidation15stronglyinflueneedbythetemPeratureandtimestayinthewater.Also，alotof51atomsdissolvedinw

6、aterwhenoxidation，whiehresultinredueeofsilieonmass.ComParedwithwaterandaqueoussolution，PEGshowedbetterProteetionfromoxidationfthesilieonPowdertosomeextent.Indi欣rentaeidiesolution，theoxidationsituationofsilieonPowder15ver

7、ydifferent.DiluteHCIsolutioneaneffeetivelyinhibittheoxidationofsilieonPowders.Ontheotherhand，notableoxidationhaPPenedonthesilieonPowdersinDiluteHFsolution(l:100andZ:100)f3daysat90oC.HydroPhilicamorphous5102formedandaloto

8、f“islands”aPPearedonthesurfaceofthesilieonPowders.However，theeoneentratedHFsolution(l:5)canremovetheoxideandthe“islands，，forllledinthediluteHFsolution.Inaddition，oxidationofkerf1055PartielesfmedintwodifferentslicingProee

9、sseswasinvestigated.ThebandsawingkerfsareeomPaetedinsPheresandtheXRDresultshowthatnotableoxidationofthesawingkerfsoeeurredinbandsawingProeess.Withtheextensionofthestoragetime，theamorphousoxideinerease.Whiletheamorphousox