表面加工多晶硅薄膜熱導(dǎo)率的在線測試研究.pdf

1、東南人學(xué)博士學(xué)位論文琶。791652表面加工多晶硅薄膜熱導(dǎo)率的在線測試研究國家“八六三”計劃MEMS重大專項“MEMS設(shè)計加工與封裝建模、模擬與IP庫”(2003AA404010)資助課題研究生姓名：盜高斌導(dǎo)師姓名：黃廢室夔援學(xué)科專業(yè)名稱：徽皇王堂與固體壘壬堂中圍南京東南大學(xué)MEMS教育部重點實驗室2004年10爿ABSTRACTPolysiliconthinfilmsarewidelyusedin^4EMSdevicesandlCsw

2、hichamimportantconstituentsofsuchmicromechanicalelementsThethermalparametersofthepolysiliconthinfilmssuchasthermalconductivitythermaldiffusivityandtemperaturecoefficientofresistance，depend曲n刪yonthefabricationprocessprodu

3、ctionenvironmenttheconcanastionmadtypeofdopantatomsandsoonwinchoredramaticdifferencefromthebulkrnsterialsinceitsheattransfermechanismdiffersubstantiallyfromthoseofbulksiliconStaticordynamicthermoeleutricalresponseofthese

4、MEMSdevicesCa!lbeestimatedifthethermalpⅢameterscanbemeasuredTherefore，itisextremelyimport∞tthatonlinetestingforthethermalparametersofthePOlysiliconthinfilmsfortheseMEMSdevicesInpracticalapplicstionsthethermoelectrical130

5、lametepsoftheMEMSdevicescannotbemeasuredirectlyTomeetonlinemonitoringasocalled“accompanyingelement’fabricatedwiththeMEMSdevicesmustbeplacedonthesamechipthatisthethennoelec：廿icalchma0蜘sticSofthe“accompanyingelemenf’msamea

6、stheMEMSdevicesmadthethermoeleclricalparametersoftheMEMSdevicescanbeobtainedbytestingthe‘a(chǎn)ccompanyingelement’Thereforeasimpleonlinemonitoringslluctureelementformeasl]岫唱thethermoelectricalpeaametershasbedesignedthemeastwe

7、mantshouldbesirnpleandadetailednumericalmalyticsolutionmustbe畫veILSteadystateandtransientstalemethodsarealsobeusedtomeasurethethermalparametersofpolysiliconthinfilmsHoweverthepmviousmethodsarenotsuitedforthecharacterizat

8、ionofthesHrfacemicrornae拙aedpolysiliconthinfilmssincemostmeasurementsmustbecroftedoutinvacuumenvironmenL111emeesurmentsandtheanalyticprocessarecomplicatedandrequiresoecialmicmmachinedstmcturesorspecialtestfixtureswhichma

9、kesthemdifficult協(xié)u駙inroutinewaferlevelmeasurementsWeproposedfabricatedandtestednoveld均矗扼枉—z甜onstructuresandmeasurementmethodforonlinetesling廿砣thermalconductivityofsurfacemicromacinnedpolysiliconthinfilmsinfffispapernefea

10、nlresofthemeasurementstructureare鋤alvzedthe柚alvticalmodelandmeasmementmethodarealsogiven11℃effectsofallheatexchangebyconvectionradiationandtheheatWmsfertttoughtheairgapandintothesubstratealecomideredinOL!relectrothermalm

11、odelmadallmeasurementscallbecapriedoutinfreeThetemperaturetoe岱cientofresistancemustbeknownbeforeextrx2jIlgthethermalconductivityandsothemicrobeamsarmgedonthesameonlinelestchipweredesignedandllsingparameterfittinganalysis

12、oftheexperiment／VcuⅣesofthebeamanditstransientstatecoolingd碡翰c0州s廿csthelineartempematrecoefficientandthequadratic把nmeJ咖retoe塌cientcallbeoblainedThethermaldiffusivityofstRfacerincromechinedpolysiliconthinfilmsisproposedal

13、soUsingtwopolysiliconimcmbeamswithsamewidthand畦aicknessbutvarletlengththethanaaldi伍JsKitycanbeexaactedfromthetimedependenceofthetwothermalresistancescoolinginfreeairAIIourmeasmemantsc齜bec硎edoutinfreeairwhilevlctltll／1tes

14、th嚷circumstancearenotrequiredneonIinetestsm|cturesfabricatedwithsurfacemicromacheddevicesmadnoadditionalmaskisrequiredaleimplemented簽aMEMStestchipcalled‘‘M刪：andsoitcanmeettheonlinemonitoringforthe№Msdevicesdes研anditspruc

15、essin島sothatitcanbewidelyusedinMEMSprocesstestingandmaterialpropertyexlractionKeywordsPolysiliconthinfilms，surfacemieromaeinningprocess，thermalconductivitytemperaturecoefficientofresistancethermaldiffusivityonlinetesting