微感應(yīng)耦合等離子體源生長碳膜及其結(jié)構(gòu)研究.pdf

1、蘇州大學(xué)碩士學(xué)位論文微感應(yīng)耦合等離子體源生長碳膜及其結(jié)構(gòu)研究姓名：孫剛申請學(xué)位級別：碩士專業(yè)：材料物理與化學(xué)指導(dǎo)教師：辛煜20080501微感應(yīng)耦合等離子體源生長碳膜及結(jié)構(gòu)研究英文摘要AbstractAminiaturizedradiofrequency—driveninductivelycoupledplasmajetsource、^，ith1356MHzhasbeendevelopedanditsapplicationtodepos

2、ithydrogenatedcarbonfilmsfromCH4andH2onsiliconorglasswafershasalsobeenstudiedPlasmajetWasgeneratedinaquartzglasstube、析tllawatercooledantennaarounditLangmuirprobehasbeenusedtotesttheplasmacharacteristicssuchaselectrontemp

3、erature，electrondensityandiondensityET350profilemeterRamanspectrum，F(xiàn)TIRandUVVISspectrumareusedforanalysisofthefilmssuchasthefilmgrowthrate，Ramanstructureandopticalenergygap晰mdifferentpowernegativebiasandgasflowrati【R=H2／

4、(H2CH4)]ItisfoundthatthehighestgrowthrateCanbereachedat11tm／minattheinputpowerof250W；TheRanlanspectraarecharacterizedbyDpeakandG—peakatabout1350cm‘1and1580cm～，whichshowstheasdepositedfilmasatypicalDLCThestructureofcarbon

5、inthefilmsismainlycomposedofsp2蘆p3andpolymedikeformsAstheinputpowerandbiasincrease，polymerlikecarbonisbrokenintosp2andsp3，SOthefluorescencesignaloftheRamanspectrumdecreases；ThedecreasedFWHMindicatesthattheorderofthefilms

6、hasbeenimproved，buttheID／Iopresentestwodifferenttrends；AstheRincreases，theID／Iodecreases，whiletheEgincreases，whichconfirmesthestructurechangeofthefilmsfromGICt0DICKeywords：Inductivelycoupledmicroplasmajet；DLC；mRmanspectr