非接觸硅片夾持裝置的研究.pdf

1、浙江大學機械工程學系碩士學位論文非接觸硅片夾持裝置的研究姓名：郭麗媛申請學位級別：碩士專業(yè)：機械電子工程指導教師：阮曉東鄒俊20100101AbstractSemiconductormanufacturingtechnologyisthecoreofelectronicandinformationindustry，andoneofthemostimportanthigh—techthatpromotesthedevelopmentofn

2、ationaleconomyandsocietyinformatization，whilethegrippingandtranspotationdeviceofsilicon、ⅣaferisanimportantpartofsemiconductormanufacturingprocessNowgrippingdeviceiscontactvacuumsuctioncup，anditiseasytoproducesurfaceconta

3、mination，scratches，distortionandotherdefectsduetodirectcontactwithwafersurface，andwillcauserejectrateincreases，lowproductivityandotherissuesinnanochipsmanufacturingThetrendofsiliconwaferislargediameterwhichhassethigherde

4、mandsandchallengeswithsemiconductormanufacturingtechnology。Inrecentyears，researchersofseveralcountriesattachgreatimportancetotheresearchofnoncontactwaferholdertechnologyNon—contact、Vaf宅rholderwhichmakesuseofaerod)7namics

5、theoryhasadvantagesoflowlimittowafermaterialandshapeandhasnopollutiontoworkingenvironment，SOvariousresearchinstitutionshaveconsidereditasthethemostpromisingwayforwaf毫rholderInthispaperduetospecialrequirementsofgrippingco

6、urseofwaferholderthefollowingmajortaskswerefinished：1Analyzetheprincipleofvortex—typenoncontactholdingdevicefromtheviewofaerodynamics，andfinishsimulationstudyusingSolidworkstoestablishflow—fieldmodelandCFDsimulationsoftw

7、aretofinishnumericalcalculation2Designsuctioncupstructureinbasisoftheoreticalanalysisandflow—fieldsimulationresults。Usehighprecisionelectronicbalancetomeasureactingforce，andmakeitclearoftherelationshipbetweenactingforcea

8、ndstructureparametersandworkconditionsofthesuctioncup3Inordertoweakenthewaferrotationandincreasetheactingforceanimprovedstructurecombinedwithdiffiuence—holeandstabilitynetwasproposedThroughthesimulationandexperiment，wege