微懸臂梁品質(zhì)因數(shù)Q控制技術(shù)的研究.pdf

1、電雹蟄⑧天洋大薯中國近代第一所★學碩士學位論文■■■一～一_________一學科專業(yè)：測試計量技術(shù)及儀器作者姓名：趙倍云指導教師：李艷寧副教授2006年1月ABSTRACTMicrocantileversarenano—sensingdeviceswithhig如sensi五vity，wideapplicatiousinmanyareassnchasthedetectiondeviceusedinatomicfoFeemicrosco

2、pythetransductiondeviceappliedinbiOSenSorsandSOonQualityfactorisaphysicalparameterofmicrocantfleverandanimportantpointerofttleperformanceofmicrocantileverQisinverselyproportionaltothesubjecteddampingofmicrocsutileverWheI

3、lamierocantileverworksintheliquidconditionthequalityfactordecreasesbecauseoftheeffectoftheliqmddampingFor鋤atomicforcemicroscopythedecreaseofqualityfactorofthekeysensingdevicethemicrocantileverwillincreasetheSCanspeedbutt

4、hesensifivityandresolutionofmicmcantlleverwilldecrease；howeverifqualityfactoristoohi曲，thenthestabilityofthemicrocantileverwflldecreaseaecerdmgly；forbiusensortheresolutionendsensitivityofmicrocantileverviilincreasebecause

5、oftheincreaseofthequalityfactorwhenthedynamicmodedetectionisusedInthisthesistllequalJtyfactorofthemicrocantileverbased01“1dynamicmodeofmicrocantileverisresearchedandadigitedqualityfactorcontrollingtechniqueisdesignedWbtr

6、iedtochangethedrivingforceandgetthevalueofqualityfactorTheexperimentresultsindicarethattllefunctionofdigltalcentreltechniquesailstiestllepresetrequirementofthewholesystemAndtheamplitudefrequencyenrveandthephasefrequencyc

7、nrveofmicrocantfleverwillchangeaccerdmglyintermofthequalityfactorThefollowingsarethemainachievementsofthisthesis：1Makeresearchonthemechanismofqualityfactorandprineiplesofcen自rollingqualityfactorbysolvingthestimulatedosci

8、llationequationofnucrocantilever；tIerelationofoscillatedmicrocantileverandexcitingforceisresearchedandthemodeltOcontrolquailtyfactorisdesigned2Basedondl季talcontroltechnologyasystemtocontrolqualityfactorisdevelopedandthec

9、orrespondingsystemcontrolsoftwareisdesignedVisualClanguageisappliedforsystemprogranumng3Thedesignedcontrolsystemofqualityfactorisappliedtothe肌erocanuleveLandaLasorDopplervibrometerisusedtoobtaini協(xié)oscfllationcurve；compari

10、sonsoftheexperimentalresultsoftheOScillationchiveofmicrocantileverwiththecontrolsystemofqualityfactorandwithoutthecontrolsystemaremadeThusthedynamiccontrolofquailtyfactorisrealized4Analysisoftheimpactofcircuittuningofthe