外文翻譯--原位溫濕度監(jiān)測(cè)發(fā)光二極管傳感器的制作方法（英文）

1、Sensors 2010, 10, 3363-3372; doi:10.3390/s100403363 sensors ISSN 1424-8220 www.mdpi.com/journal/sensors Article Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes Chi-Yua

2、n Lee *, Ay Su, Yin-Chieh Liu, Pin-Cheng Chan and Chia-Hung Lin Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan; E-Mails: meaysu@saturn.yzu.edu.tw (A.S.); M77YCLIU@satu

3、rn.yzu.edu.tw (Y.C.L.); s975132@mail.yzu.edu.tw (P.C.C.); s975009@mail.yzu.edu.tw (C.H.L.) * Author to whom correspondence should be addressed; E-Mail: cylee@saturn.yzu.edu.tw; Tel.: +886-3-4638800 ext. 2478; Fax: +886-

4、3-4558013. Received: 8 February 2010; in revised form: 30 February 2010 / Accepted: 20 March 2010 / Published: 7 April 2010 Abstract: In this work micro temperature and humidity sensors are fabricated to measure the junc

5、tion temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data captur

6、e is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in r

7、eal time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The mi

8、cro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06 ± 0.005 (?/°C) and 0.033 pF/%RH, respectively. Keywords

9、: LED; MEMS; flexible micro temperature; humidity sensors 1. Introduction Light emitting diodes (LED), which are environmentally friendly, consume little power and have a long lifetime, have caused a revolution in illum

10、ination in the 21st century. They are favored because of OPEN ACCESSSensors 2010, 10 3365sensing materials in temperature sensors, the former is expensive while the latter has a higher conductivity and flexibility. Ther

11、efore, in this work, Au is used in the device [7]. As the environmental temperature increases, the resistance of the RTD also increases, because a metal conductor has a positive temperature coefficient (PTC). Figure 1 de

12、picts the structure of the micro temperature sensor. Figure 1. Structure of micro temperature sensor. When the temperature of the RTD varies linearly, the relationship between the measured resistance and the change in t

13、emperature can be expressed as: Rt = Ri (1+ T ? T) (1) where Rt represents the resistance at t °C; Ri is the resistance at i ?C, and αT is the sensitivity (1/?C). Equation (1) can be rewritten as: ( )t i TiR RR T ?

14、? ? ?(2) 2.2. Theory of Micro Humidity Sensor The three main classes of humidity sensors are ceramic, electrolyte-based and polymer-based. Polymer-based sensors are either of the capacitance type or of the resistance typ

15、e. Although the measurement range of the polymer-based sensor is not as large as that of the ceramic-based sensor, it is simply fabricated, low-cost, and highly accurate because of the high degree of polymer polymerizati

16、on. It is useful for developing rapid IC processes. The polymer must have high resistance and a low dielectric constant. As the amount of vapor that is absorbed by the polymer increases, the dielectric constant increases

17、 and the increase in the capacitance can be derived using Equation (3): 0 ( ) A C RH d ? ? ?(3) where C is capacitance (F); ?0 is the dielectric constant of a vacuum; ? is the dielectric constant of the environment; A is