電磁驅(qū)動(dòng)微運(yùn)動(dòng)的測(cè)量與控制方法畢業(yè)論文（設(shè)計(jì)）

1、摘要在微運(yùn)動(dòng)系統(tǒng)中，驅(qū)動(dòng)器是實(shí)施微運(yùn)動(dòng)的關(guān)鍵部件，為了實(shí)現(xiàn)高精度的微運(yùn)動(dòng)，驅(qū)動(dòng)器必須具備高運(yùn)動(dòng)精度和高定位精度，因此驅(qū)動(dòng)器技術(shù)是微運(yùn)動(dòng)系統(tǒng)的核心技術(shù)。概括國(guó)內(nèi)外微運(yùn)動(dòng)系統(tǒng)驅(qū)動(dòng)器技術(shù)，從驅(qū)動(dòng)原理和方式上看，主要驅(qū)動(dòng)形式有壓電驅(qū)動(dòng)、靜電驅(qū)動(dòng)、形狀記憶合金驅(qū)動(dòng)和電磁驅(qū)動(dòng)等。這次我的畢業(yè)設(shè)計(jì)的主要內(nèi)容是：采用電磁驅(qū)動(dòng)、電感傳感器和PID控制方法，設(shè)計(jì)一套一維電磁式微驅(qū)動(dòng)器的測(cè)量與控制系統(tǒng)，該驅(qū)動(dòng)器的運(yùn)動(dòng)范圍是5mm、分辨率是1m。本次畢業(yè)設(shè)計(jì)第

2、1章介紹了電磁驅(qū)動(dòng)國(guó)內(nèi)外研究的現(xiàn)狀和發(fā)展趨勢(shì)介紹了電磁驅(qū)動(dòng)的研究意義。第2章介紹了電磁驅(qū)動(dòng)系統(tǒng)總體框圖對(duì)電磁鐵驅(qū)動(dòng)理論和電感傳感器理論進(jìn)行了分析。第3章設(shè)計(jì)了電感傳感器的信號(hào)采集電路和基于AD698的電感傳感器信號(hào)調(diào)理電路，對(duì)AT89C51做了簡(jiǎn)要的介紹，設(shè)計(jì)出了基于AD7705與89C51的AD轉(zhuǎn)換電路和基于ZLG7290與89C51的顯示電路的硬件設(shè)計(jì)。設(shè)計(jì)了電磁驅(qū)動(dòng)的功率放大電路。第4章對(duì)前面所做的工作和工作過(guò)程的感想做了小結(jié)。此

3、次畢業(yè)設(shè)計(jì)主要要完成的有：電磁驅(qū)動(dòng)器的設(shè)計(jì)，電壓放大，AD、LED顯示管的選用以及單片機(jī)和它們的連接，簡(jiǎn)單的單片機(jī)編程，PID控制方法和原理等內(nèi)容。關(guān)鍵詞：微機(jī)電系統(tǒng)；電磁驅(qū)動(dòng)器；單片機(jī)；控制測(cè)量；硬件設(shè)計(jì)AbstractInthemicromotionsystemthedriveisakeycomponentoftheimplementationofmicromovementsindertoachievehighprecisionmi

4、cromotionthedrivermusthavehighprecisionhighpositioningaccuracyofmotionsothedrivetechnologyisthecetechnologyofmicromotionsystem.Generaldomesticmicromotionsystemdrivetechnologyprinciplesmethodsfromthedriverpointofviewthema

5、indriverinthefmofpiezoelectricelectrostaticactuationshapememyalloydriverelectromagicdrives.Thegraduationofmymaincontentis:usingelectromagicdriveinductivesenssPIDcontrolmethodtodesignaonedimensionalelectromagicmicrodrivec

6、ontrolsystemofmeasurementrangeofmotionofthedriveis5mmtheresolutionis1μm.ThegraduationprojectChapter1describesthestatusoftheelectromagicdrivedomesticfeignresearchdevelopmenttrendoftheresearchdescribedelectromagicdrivemean

7、ing.Chapter2describestheoverallblockdiagramoftheelectromagicdrivesystemtheytheinductivesenssolenoiddriventheyisanalyzed.Chapter3DesignoftheinductivesenssignalacquisitioncircuittheinductancebasedonAD698senssignalcondition

8、ingcircuitabriefintroductionofAT89C51isdesignedbasedontheAD7705the89C51oftheADconversioncircuitthedisplaybasedonZLG7290withthe89C51hardwarecircuitDesign.Designoftheelectromagicdrivepoweramplifiercircuit.Chapter4oftheprev

9、iouswkthewkprocesswithasummarythoughtsthemaingraduationprojecttobecompletedare:thedesignofelectromagicdrivesvoltageamplificationADLEDdisplaytubesthechoiceofmicrocontrollertheirconnectionssimplemicrocontrollerprogrammingP